Kinetics of the Thermal Oxidation of Silicon in O 2 / H 2 O and O 2 / Cl2 Mixtures
- 1 February 1978
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 125 (2), 339-346
- https://doi.org/10.1149/1.2131442