Abstract
In recent years the requirements for higher current ion beams have increased notably in a wide area of applications. To meet these requirements it has been necessary to develop better understanding of the three main components of ion beam systems, namely the plasma source in which ions of the species needed can be produced at controlled rates with spatial and temporal uniformity, the extraction electrode systems for formation of low divergence and low emittance ion beams, and the transport of the ion beams in the presence of possible high space charge forces. In this review developments in these areas are discussed with the objective of indicating the advances in understanding the basic processes which are important.

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