Fabrication of Ultrathin Films
- 1 May 1968
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 39 (5), 741-743
- https://doi.org/10.1063/1.1683488
Abstract
A method is described for the preparation of thin supported films of aluminum and carbon that can be several centimeters in diameter and contain as little as 1 μg/cm2 of material. The thickness of the prepared films is estimated to be well below 100 Å with a total pinhole area of less than 0.01%. Aluminum and carbon films prepared by this method were found capable of supporting pressure differentials of 10−3 to 10−9 mm Hg across their areas, at a maximum pressure of 10−3 mm Hg on one side.Keywords
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