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Aging in Quartz SAW Resonators
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Aging in Quartz SAW Resonators
Aging in Quartz SAW Resonators
WS
W.R. Shreve
W.R. Shreve
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1 January 1977
proceedings article
Published by
Institute of Electrical and Electronics Engineers (IEEE)
p.
857-861
https://doi.org/10.1109/ultsym.1977.196959
Abstract
No abstract available
Keywords
AGING
SURFACE ACOUSTIC WAVES
PLASMA TEMPERATURE
PLASMA APPLICATIONS
PLASMA MATERIALS PROCESSING
FREQUENCY
ETCHING
PLASMA DEVICES
ZINC OXIDE
NARROWBAND
Cited by 16 articles