Metal wire definition by high resolution imprint and lift-off
- 31 May 1999
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 46 (1-4), 179-181
- https://doi.org/10.1016/s0167-9317(99)00056-8
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Nanoscale silicon field effect transistors fabricated using imprint lithographyApplied Physics Letters, 1997
- Mold-assisted nanolithography: A process for reliable pattern replicationJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Nanometer-scale field-induced oxidation of Si(111):H by a conducting-probe scanning force microscope: Doping dependence and kineticsApplied Physics Letters, 1995