The penetration depth of light into a processed surface is interferometrically ieasured by optically contacting it on a glass plate with a resolution of 3 urn. This principle is based on the ieasurement of the difference between the phase changes of light in reflections on the object and the glass plate. Also the depth is siiiultanecusly measured by an optical systeii with a phase-locked laser interferometer and an optical displacement sensor. 1 .