Oxygen-induced segregation effects in sputter depth-profiling
- 1 April 1986
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 15 (1-6), 206-209
- https://doi.org/10.1016/0168-583x(86)90286-7
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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