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Microminiaturization of electron optical systems
Home
Publications
Microminiaturization of electron optical systems
Microminiaturization of electron optical systems
TC
T. H. P. Chang
T. H. P. Chang
DK
D. P. Kern
D. P. Kern
LM
L. P. Muray
L. P. Muray
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1 November 1990
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 8
(6)
,
1698-1705
https://doi.org/10.1116/1.585142
Abstract
No abstract available
Keywords
MICROMINIATURIZATION OF ELECTRON OPTICAL SYSTEMS
Cited by 68 articles