A novel stylus profiler without nonlinearity and parasitic motion for FPD inspection system

Publisher Website

1 October 2007

journal article
Published by Springer Nature in Journal of Mechanical Science and Technology

Vol. 21 (10), 1491-1497
https://doi.org/10.1007/bf03177364

Abstract

No abstract available

Keywords

This publication has 1 reference indexed in Scilit:

Comparison of surface roughness measurements by stylus profiler, AFM and non-contact optical profiler
Wear, 1995

Cited by 8 articles