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The Substrate Orientation Effect on Impurity Profiles of Epitaxial GaAs Films
Home
Publications
The Substrate Orientation Effect on Impurity Profiles of Epitaxial GaAs Films
The Substrate Orientation Effect on Impurity Profiles of Epitaxial GaAs Films
RM
R. R. Moest
R. R. Moest
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1 January 1966
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 113
(2)
,
141
https://doi.org/10.1149/1.2423888
Abstract
No abstract available
Keywords
ORIENTATION EFFECT
GAAS FILMS
EPITAXIAL GAAS
IMPURITY PROFILES
SUBSTRATE ORIENTATION
Cited by 17 articles