An inversion method for the complete characterization of transparent film-absorbing substrate systems using multiple angle ellipsometry
- 30 June 1992
- journal article
- Published by Elsevier BV in Solid-State Electronics
- Vol. 35 (6), 855-864
- https://doi.org/10.1016/0038-1101(92)90288-n
Abstract
No abstract availableKeywords
This publication has 19 references indexed in Scilit:
- A new method for ellipsometric inversion with microcomputers: Characterization of optically absorbing films using multiple-angle-of-incidenceSurface Science, 1989
- Numerical method for the ellipsometric determination of optical constants and thickness of thin films with microcomputersSurface Science, 1988
- Ellipsometer measurement of thickness and optical properties of thin absorbing filmsApplied Surface Science, 1988
- Ellipsometric data processing: an efficient method and an analysis of the relative errorsApplied Optics, 1985
- Method for numerical inversion of the ellipsometry equation for transparent filmsJournal of the Optical Society of America, 1983
- Implications of three parameter solutions to the three-layer modelSurface Science, 1976
- Ellipsometric analyses for an absorbing surface film on an absorbing substrate with or without an intermediate surface layerSurface Science, 1976
- Generalized ellipsometric method for the determination of all the optical constants of the system: Optically absorbing film on an absorbing substrateSurface Science, 1976
- Ellipsometer Data Analysis with a Small Programmable Desk CalculatorApplied Optics, 1972
- Error analysis of angle of incidence measurementsSurface Science, 1969