Fermi energy dependence of surface desorption and diffusion of hydrogen in a-Si:H
- 1 December 1989
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 114, 217-219
- https://doi.org/10.1016/0022-3093(89)90117-8
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
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- A SIMS analysis of deuterium diffusion in hydrogenated amorphous siliconApplied Physics Letters, 1978
- Thermal desorption of gasesVacuum, 1962