Low temperature MOCVD of advanced barrier layers for the microelectronics industry
- 1 November 1993
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 73, 31-41
- https://doi.org/10.1016/0169-4332(93)90143-y
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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