Low-range flowmeters for use with vacuum and leak standards

Abstract
Vacuum pressure standards of the orifice-flow type require known gas flows of 10−6 mol/s (10−2 atm cm3/s at 0 °C) and less. Known gas flows can also be used to calibrate ‘‘standard’’ leaks by comparing the pressures generated when flows from the leak and the flowmeter are alternately passed through a constant conductance. Two constant-pressure, piston displacement flowmeters developed at the National Bureau of Standards are described that can generate flows between 10−6 and 10−10 mol/s with an estimated uncertainty of 0.8% to 2%. Comparisons of the flowmeters with alternate calibration techniques, and repeated low-range leak and vacuum gauge calibrations, have been used to confirm the estimated uncertainty and random errors of the flowmeter.