Three-dimensional micromachining of silicon pressure sensor integrating resonant strain gauge on diaphragm
- 1 April 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 23 (1-3), 1007-1010
- https://doi.org/10.1016/0924-4247(90)87078-w
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Force Sensing Using Quartz Crystal Flexure ResonatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1984
- Growth Process of Silicon Over SiO2 by CVD: Epitaxial Lateral Overgrowth TechniqueJournal of the Electrochemical Society, 1983