Low-cost pressure/force transducer with silicon thin film strain gauges
- 1 January 1983
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 4, 183-189
- https://doi.org/10.1016/0250-6874(83)85023-9
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- The electrical properties of polycrystalline silicon filmsJournal of Applied Physics, 1975