Studies of temperature and flux dependences of sputtering yield of nickel from two-layered films of Ni-Ni3C
- 1 March 1984
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 2 (1-3), 596-600
- https://doi.org/10.1016/0168-583x(84)90273-8
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology
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