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Fabrication techniques for integrated sensor microstructures
Home
Publications
Fabrication techniques for integrated sensor microstructures
Fabrication techniques for integrated sensor microstructures
HG
H. Guckel
H. Guckel
DB
D.W. Burns
D.W. Burns
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1 January 1986
proceedings article
Published by
Institute of Electrical and Electronics Engineers (IEEE)
p.
176-179
https://doi.org/10.1109/iedm.1986.191143
Abstract
No abstract available
Keywords
FABRICATION
MICROSTRUCTURE
SILICON
TRANSDUCERS
CAPACITIVE SENSORS
ETCHING
MECHANICAL SENSORS
RESISTORS
THERMAL RESISTANCE
MICROELECTRONICS
Cited by 14 articles