A simple method for microlens fabrication by the modified LIGA process
- 22 April 2002
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 12 (3), 334-340
- https://doi.org/10.1088/0960-1317/12/3/321
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Fabrication and characterization of microlenses realized by a modified LIGA processPure and Applied Optics: Journal of the European Optical Society Part A, 1997
- Out-of-plane refractive microlens fabricated by surface micromachiningIEEE Photonics Technology Letters, 1996
- Fabrication of microlenses by plasmaless isotropic etching combined with plastic mouldingSensors and Actuators A: Physical, 1996
- Production of separation-nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplasticsThe Science of Nature, 1982