A micromachined silicon electron tunneling sensor
- 4 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Magnetic field sensing with magnetostrictive materials using a tunneling tip detectorSensors and Actuators, 1989
- An electron tunneling sensorSensors and Actuators, 1989
- Some design criteria in scanning tunneling microscopyIBM Journal of Research and Development, 1986
- Surface Studies by Scanning Tunneling MicroscopyPhysical Review Letters, 1982
- Silicon as a mechanical materialProceedings of the IEEE, 1982