Extreme ultraviolet transmission grating monochromator
- 1 September 1981
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 20 (17), 3047-3049
- https://doi.org/10.1364/ao.20.003047
Abstract
A compact monochromator has been designed to utilize recently developed free-standing XUV transmission gratings. Tests using a condensed spark source of far UV radiation show that this monochromator, with 20-μm slits, is capable of 0.08-nm resolution at 30 nm in the first order. A physical description of the system and test results are presented.This publication has 9 references indexed in Scilit:
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