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Delta doping of III–V compound semiconductors: Fundamentals and device applications
Home
Publications
Delta doping of III–V compound semiconductors: Fundamentals and device applications
Delta doping of III–V compound semiconductors: Fundamentals and device applications
ES
E. F. Schubert
E. F. Schubert
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1 May 1990
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 8
(3)
,
2980-2996
https://doi.org/10.1116/1.576617
Abstract
No abstract available
Keywords
III
DOPING
DOPANTS
TUNABLE
SUPERLATTICES
VOLTAGE
FUNCTION
GROWTH TEMPERATURES
Cited by 273 articles