Microtribological improvement of carbon film by silicon inclusion and fluorination
- 1 September 1993
- Vol. 168 (1-2), 155-159
- https://doi.org/10.1016/0043-1648(93)90211-4
Abstract
No abstract availableFunding Information
- Ministry of Education, Culture, Sports, Science and Technology
This publication has 11 references indexed in Scilit:
- Tribological study of cubic boron nitride filmThin Solid Films, 1992
- Microtribological properties and potential applications of hard, lubricating coatingsThin Solid Films, 1992
- Micro-Tribological Studies on Fluorinated Carbon FilmsJournal of Tribology, 1991
- Oriented hydrocarbons transferred from a high performance lubricative amorphous C:H:Si film during sliding in a vacuumApplied Physics Letters, 1990
- Lubricating performance enhancement of amorphous silicon carbide film by annealing effects and microbeam analyses of the tribological interfaceJournal of Applied Physics, 1989
- Friction and Wear Behavior of Hard Carbon FilmsA S L E Transactions, 1987
- Preparation and properties of hard i-C and i-BN coatingsThin Solid Films, 1982
- Some new results on the fabrication of and the mechanical, electrical and optical properties of i-carbon layersThin Solid Films, 1981
- Frictional properties of diamondlike carbon layersApplied Physics Letters, 1980
- Ion-Beam Deposition of Thin Films of Diamondlike CarbonJournal of Applied Physics, 1971