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Mechanical properties of hard a-C:H films
Home
Publications
Mechanical properties of hard a-C:H films
Mechanical properties of hard a-C:H films
RK
R Kleber
R Kleber
WD
W Dworschak
W Dworschak
JG
J Gerber
J Gerber
AF
A Fuchs
A Fuchs
TP
T Pütz
T Pütz
JS
J Scherer
J Scherer
KJ
K Jung
K Jung
HE
H Ehrhardt
H Ehrhardt
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10 January 1990
journal article
Published by
Elsevier
in
Vacuum
Vol. 41
(4)
,
1378-1380
https://doi.org/10.1016/0042-207x(90)93962-i
Abstract
No abstract available
Keywords
FILMS
MECHANICAL PROPERTIES OF HARD
Cited by 12 articles