Monte Carlo simulation of sputtering and saturation phenomena for low energy noble gas ions
- 1 June 1986
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 16 (4-5), 340-344
- https://doi.org/10.1016/0168-583x(86)90093-5
Abstract
No abstract availableThis publication has 24 references indexed in Scilit:
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