Experimental determinations of electron stopping power at low energies

Abstract

An accurate knowledge of electron stopping power is important for calculations and simulations of electron beam interactions with solids especially in the low energy region (< 10 keV). This paper describes a simplified and rapid experimental procedure using based on electron energy loss spectroscopy which permits accurate stopping power determinations to be made from any material which can be observed in a transmission electron microscope. It is demonstrated that the stopping power and oscillator strength data so generated is in good agreement with other measurements and theoretical predictions. The technique is now being applied to a wide variety of materials of semiconductor interest.