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Extremely high transconductance (above 500 mS/mm) MOSFET with 2.5 nm gate oxide
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Publications
Extremely high transconductance (above 500 mS/mm) MOSFET with 2.5 nm gate oxide
Extremely high transconductance (above 500 mS/mm) MOSFET with 2.5 nm gate oxide
SH
S. Horiguchi
S. Horiguchi
TK
T. Kobayashi
T. Kobayashi
MM
M. Miyake
M. Miyake
MO
M. Oda
M. Oda
KK
K. Kiuchi
K. Kiuchi
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1 January 1985
conference paper
Published by
Institute of Electrical and Electronics Engineers (IEEE)
p.
761-763
https://doi.org/10.1109/iedm.1985.191088
Abstract
No abstract available
Keywords
TRANSCONDUCTANCE
MOSFET CIRCUITS
IMPURITIES
CAPACITANCE
FREQUENCY
DRY ETCHING
LABORATORIES
MOS DEVICES
WRITING
ELECTRONS
Cited by 9 articles