Effect of electron energy on defect introduction in silicon
- 1 June 1966
- journal article
- Published by Elsevier in Journal of Physics and Chemistry of Solids
- Vol. 27 (6-7), 913-918
- https://doi.org/10.1016/0022-3697(66)90061-8
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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