Crystallisation and Tetragonal-Monoclinic Transformation in ZrO2 and HfO2 Dielectric Thin Films

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1 December 2001

journal article
Published by Trans Tech Publications, Ltd. in Key Engineering Materials

Vol. 206-213, 1285-1288
https://doi.org/10.4028/www.scientific.net/kem.206-213.1285

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Cited by 45 articles