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Effects of Si—C Bond Content on Film Properties of Organic Spin‐on Glass
Home
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Effects of Si—C Bond Content on Film Properties of Organic Spin‐on Glass
Effects of Si—C Bond Content on Film Properties of Organic Spin‐on Glass
TN
Tadashi Nakano
Tadashi Nakano
KT
Kyoji Tokunaga
Kyoji Tokunaga
TO
Tomohiro Ohta
Tomohiro Ohta
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1 April 1995
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 142
(4)
,
1303-1308
https://doi.org/10.1149/1.2044168
Abstract
No abstract available
Cited by 22 articles