Fabrication and testing of the planar magnetic micromotor
- 1 September 1991
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 1 (3), 135-138
- https://doi.org/10.1088/0960-1317/1/3/001
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Laterally Driven Polysilicon Resonant MicrostructuresSensors and Actuators, 1989