Copper Oxide-Loaded Tin Dioxide Thin Film for Detection of Dilute Hydrogen Sulfide

Abstract
The H2S sensing characteristics of SnO2 thin films loaded with CuO were found to be much improved by reducing the film thickness. A 40-nm-thick film showed sensitivity as high as 20000 and 2000 to 1.5 and 0.3 ppm H 2 S in air, respectively, at 200° C, while the rate of response to 0.3 ppm H 2 S was rather slow.