Tantalum pentoxide (Ta2O5) thin films for advanced dielectric applications
- 1 May 1998
- journal article
- review article
- Published by Elsevier in Materials Science and Engineering: R: Reports
- Vol. 22 (6), 269-322
- https://doi.org/10.1016/s0927-796x(97)00023-5
Abstract
No abstract availableKeywords
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