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AES Investigation of the Chemical Structure of Plasma‐Deposited Silicon Nitride
Home
Publications
AES Investigation of the Chemical Structure of Plasma‐Deposited Silicon Nitride
AES Investigation of the Chemical Structure of Plasma‐Deposited Silicon Nitride
HM
H. H. Madden
H. H. Madden
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1 March 1981
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 128
(3)
,
625-629
https://doi.org/10.1149/1.2127471
Abstract
No abstract available
Cited by 19 articles