Fabrication of submicrometer regular arrays of pillars and helices
- 1 November 1999
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 17 (6), 2671-2674
- https://doi.org/10.1116/1.591046
Abstract
We use a glancing-angle deposition technique to produce regular lattices of submicrometer pillars and helices with a two-dimensional lattice constant below 1 μm and structure heights of 0.5–10 μm. Possible applications of such structures include photonic crystals and magnetic-storage media.Keywords
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