Interface positions measured at the lattice constant scale by Auger analysis on chemical bevels
Open Access
- 1 January 1984
- journal article
- Published by EDP Sciences in Journal de Physique Lettres
- Vol. 45 (20), 999-1005
- https://doi.org/10.1051/jphyslet:019840045020099900
Abstract
Experimental results of Auger profiles obtained on chemical bevels of hetero-epitaxial structures (InP/Gaxln1-xAs/lnP) are reported. The theoretical analysis of these results shows that the positions of the interfaces and widths of the quantum wells can be determined with an accuracy of ± one lattice spacing (ultimate limit). The evolution of the concentration gradient is also suggested. Quantum wells of ∼ 3.5 nm thick (6 lattice spacings) are well resolvedKeywords
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