High-quality carbon nanotubes production using plasma-chemistry deposition method

Abstract

Catalyst assisted chemical vapor deposition(CVD)is one of the most viable routes in production of carbon nanotubes(CNTs), but purification and deposition in oriented position still remain an open question. This contribution presents a method to deposit high-quality nanotubes, using RF-plasma assisted CVD and catalytic decomposition of a ferrocene-toluene mixture in a quartz tube reactor. The most important phenomena that have been encountered are that the iron released from ferrocene play catalyst role only on a characteristic length, being removed after that by plasma etching. Raman spectroscopy and Transmission Electron Microscopy(TEM)characterized the obtained carbon structures.