High-Coercive-Force Rare-Earth Alloy Films by Getter Sputtering

Abstract

Thin films of the rare‐earth alloys of the Co–Sm system with and without the addition of Cu have been found to have exceptionally high coercive forces. A coercive force of 30 000 Oe was realized with Co3.65Cu1.35Sm films, 4000‐Å thick prepared at a substrate temperature of 500°C using getter sputtering. This technique avoids troublesome oxidation problems usually encountered in preparing films of active materials such as the rare‐earth compounds.