Spectroscopy of flowing discharges and post-discharges in reactive gases
- 1 October 1993
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 59 (1-3), 67-76
- https://doi.org/10.1016/0257-8972(93)90056-t
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
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- Production of argon metastable atoms in high pressure (20-300 Torr) microwave dischargesRevue de Physique Appliquée, 1988
- Positive and negative ions in silane and disilane multipole dischargesInternational Journal of Mass Spectrometry and Ion Processes, 1984
- Experimental study of the C(3P)+N(4S)+M→CN(B 2Σ+)+M recombinationThe Journal of Chemical Physics, 1975