Picometric profilometry. II. Multidetector approach and multiplexed lock-in detection
- 1 November 1995
- journal article
- Published by IOP Publishing in Journal of Optics
- Vol. 26 (6), 251-265
- https://doi.org/10.1088/0150-536x/26/6/003
Abstract
In a first paper [Journal of Optics, vol.25, p.207, 1994] we described a surface profilometer using a single detector and a sample scanning procedure. We have developed a multidetector version of this setup using a CCD linear array (256 pixels) and an original multiplexed lockin detection procedure.Keywords
This publication has 1 reference indexed in Scilit:
- Interferometric polarization picometric profile. I. Single detector approachJournal of Optics, 1994