Industrial microwave plasma polymerization
- 1 August 1984
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 118 (2), 203-210
- https://doi.org/10.1016/0040-6090(84)90073-7
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Bonding in hydrogenated hard carbon studied by optical spectroscopySolid State Communications, 1983
- The development of diamondlike (i‐carbon) thin films as antireflecting coatings for silicon solar cellsJournal of Vacuum Science and Technology, 1982
- Difluorocarbene Emission Spectra from Fluorocarbon Plasmas and Its Relationship to Fluorocarbon Polymer FormationJournal of the Electrochemical Society, 1982
- Plasma for Modification of PolymersJournal of Macromolecular Science: Part A - Chemistry, 1976
- The Large Volume Microwave Plasma Generator (LMP™): A New Tool for Research and Industrial Processing*The Journal of Microwave Power, 1972
- Absorption of Microwave Power by Plasmas*The Journal of Microwave Power, 1970
- Translational Energy Distribution of Electrons and Positive Ions in the Plasma of Microwave and High-Frequency Discharges of He, Ne, and ArJournal of Applied Physics, 1968