A Vibrational Technique for Stress Measurement in Films
- 1 January 1990
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Internal stress and internal friction in thin-layer microelectronic materialsJournal of Applied Physics, 1990
- Measurement of Stresses in Thin Films Using Holographic Interferometry: Dependence on Atmospheric ConditionsMRS Proceedings, 1990
- Stress Measurement in Spin Coated Polyimide Films Using Time Average Holographic InterferometryMRS Proceedings, 1989
- Effects of stress on the stability of x-ray masksJournal of Vacuum Science & Technology B, 1986
- Handbook of Thin Film TechnologyJournal of the Electrochemical Society, 1971
- Vibration of Circular PlatesThe Journal of the Acoustical Society of America, 1962