The combined effects of Fe and H2 on the kinetics of silicon nitridation
- 1 October 1978
- journal article
- letter
- Published by Springer Nature in Journal of Materials Science
- Vol. 13 (10), 2289-2290
- https://doi.org/10.1007/bf00541693
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- A mechanism for the nitridation of Fe-contaminated siliconJournal of Materials Science, 1978
- The Effects of Iron on the Nitridation of SiliconPublished by Springer Nature ,1977
- Nitridation of High‐Purity SiliconJournal of the American Ceramic Society, 1976
- Atmosphere Effects on Wetting of Si3N4 by Liquid SiJournal of the American Ceramic Society, 1976
- Effect of H2‐N2 Nitriding Atmospheres on the Properties of Reaction‐Sintered Si3N4Journal of the American Ceramic Society, 1975
- Mass Spectrometric Studies of the Nitridation of SiliconJournal of the American Ceramic Society, 1975