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Ion beam sputter-deposited diamondlike films
Home
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Ion beam sputter-deposited diamondlike films
Ion beam sputter-deposited diamondlike films
BB
Bruce A. Banks
Bruce A. Banks
SR
Sharon K. Rutledge
Sharon K. Rutledge
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1 September 1982
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 21
(3)
,
807-814
https://doi.org/10.1116/1.571828
Abstract
No abstract available
Cited by 65 articles