Optical characterisation of 2D InP-based photonic crystals fabricated by inductively coupled plasma etching
- 1 January 2002
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 38 (17), 962-964
- https://doi.org/10.1049/el:20020666
Abstract
Two-dimensional photonic crystals (PCs) were fabricated in InP/GaInAsP waveguides by e-beam lithography and inductively coupled plasma etching. Transmission measurements through simple PC slabs, one-dimensional Fabry-Pérot cavities and PC-based waveguides are reported showing clear improvements of the PC optical properties with respect to the results obtained by other etch methods.Keywords
This publication has 3 references indexed in Scilit:
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