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Electrical Defects in Silicon Introduced by Sputtering and Sputter‐Etching
Home
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Electrical Defects in Silicon Introduced by Sputtering and Sputter‐Etching
Electrical Defects in Silicon Introduced by Sputtering and Sputter‐Etching
EG
E. Grusell
E. Grusell
SB
S. Berg
S. Berg
LA
L. P. Andersson
L. P. Andersson
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1 July 1980
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 127
(7)
,
1573-1576
https://doi.org/10.1149/1.2129953
Abstract
No abstract available
Cited by 69 articles