Direct observation of water incorporation in PECVD SiO2 films by UV-Visible ellipsometry
- 31 December 1997
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 311 (1-2), 212-217
- https://doi.org/10.1016/s0040-6090(97)00471-9
Abstract
No abstract availableKeywords
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