Formation of high-density silicon dots on a silicon-on-insulator substrate
- 28 April 1999
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 142 (1-4), 553-557
- https://doi.org/10.1016/s0169-4332(98)00703-x
Abstract
No abstract availableKeywords
Funding Information
- Takahashi Industrial and Economic Research Foundation
- Ministry of Education, Culture, Sports, Science and Technology
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