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Oxide Growth on Etched Silicon in Air at Room Temperature
Home
Publications
Oxide Growth on Etched Silicon in Air at Room Temperature
Oxide Growth on Etched Silicon in Air at Room Temperature
SR
S. I. Raider
S. I. Raider
RF
R. Flitsch
R. Flitsch
MP
M. J. Palmer
M. J. Palmer
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1 March 1975
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 122
(3)
,
413-418
https://doi.org/10.1149/1.2134225
Abstract
No abstract available
Cited by 187 articles