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Dislocations and interfaces in semiconductor heterostructures
Home
Publications
Dislocations and interfaces in semiconductor heterostructures
Dislocations and interfaces in semiconductor heterostructures
JN
J. Narayan
J. Narayan
SS
S. Sharan
S. Sharan
JF
J. C. C. Fan
J. C. C. Fan
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1 April 1989
journal article
semiconductor processing
Published by
Springer Nature
in
JOM
Vol. 41
(4)
,
10-15
https://doi.org/10.1007/bf03220191
Abstract
No abstract available
Keywords
GAAS
BURGER VECTOR
RAPID THERMAL ANNEALING
CRITICAL THICKNESS
MISFIT DISLOCATION
Cited by 2 articles